Invention Grant
- Patent Title: Silicon surface state detectors and detector arrays
- Patent Title (中): 硅表面状态检测器和检测器阵列
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Application No.: US12572234Application Date: 2009-10-01
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Publication No.: US08212217B2Publication Date: 2012-07-03
- Inventor: Axel Scherer , Michael D. Henry , Harold Hager
- Applicant: Axel Scherer , Michael D. Henry , Harold Hager
- Applicant Address: US IL Chicago US CA Pasadena
- Assignee: Boeing Company,California Institute of Technology
- Current Assignee: Boeing Company,California Institute of Technology
- Current Assignee Address: US IL Chicago US CA Pasadena
- Agency: Steinfl & Bruno, LLP
- Main IPC: G01T1/24
- IPC: G01T1/24
Abstract:
Photodetection devices and methods are described. The photodetection devices comprise semiconductor tapered pillars.
Public/Granted literature
- US20100155602A1 SILICON SURFACE STATE DETECTORS AND DETECTOR ARRAYS Public/Granted day:2010-06-24
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