Invention Grant
- Patent Title: Resistive memory device with an air gap
- Patent Title (中): 具有气隙的电阻式存储器件
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Application No.: US12649350Application Date: 2009-12-30
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Publication No.: US08212231B2Publication Date: 2012-07-03
- Inventor: Wei-Su Chen
- Applicant: Wei-Su Chen
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW98145665A 20091229
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A resistive memory device and a fabricating method thereof are introduced herein. In resistive memory device, a plurality of bottom electrodes is disposed in active region of a substrate. Each of the bottom electrodes is disposed to correspond to each of the conductive channels; a patterned resistance switching material layer and the patterned top electrode layer are sequentially stacked on the bottom electrodes. An air dielectric layer exists between the patterned resistance switching material layer and the bottom electrodes. A plurality of patterned interconnections is disposed on the patterned top electrode.
Public/Granted literature
- US20110155991A1 RESISTIVE MEMORY DEVICE AND FABRICATING METHOD THEREOF Public/Granted day:2011-06-30
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