Invention Grant
US08212233B2 Forming phase-change memory using self-aligned contact/via scheme
有权
使用自对准接触/通孔方案形成相变存储器
- Patent Title: Forming phase-change memory using self-aligned contact/via scheme
- Patent Title (中): 使用自对准接触/通孔方案形成相变存储器
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Application No.: US12713541Application Date: 2010-02-26
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Publication No.: US08212233B2Publication Date: 2012-07-03
- Inventor: Ming-Tsong Wang , Chien-Chih Chiu , Tsun Kai Tsao , Chi-Hsin Lo
- Applicant: Ming-Tsong Wang , Chien-Chih Chiu , Tsun Kai Tsao , Chi-Hsin Lo
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L21/8239 ; H01L27/105

Abstract:
An integrated circuit structure includes a dielectric layer having an upper portion and a lower portion. The dielectric layer is either an inter-layer dielectric (ILD) or an inter-metal dielectric (IMD). A phase change random access memory (PCRAM) cell includes a phase change strip, wherein the phase change strip is on the lower portion and has a top surface lower than a top surface of the dielectric layer, and a bottom surface higher than a bottom surface of the dielectric layer. A first conductive column is electrically connected to the phase change strip. The first conductive column extends from the top surface of the dielectric layer down into the dielectric layer. A second conductive column is in a peripheral region. The second conductive column extends from the top surface of the dielectric layer down into the dielectric layer. The first conductive column and the second conductive column have different heights.
Public/Granted literature
- US20100301303A1 Forming Phase-Change Memory Using Self-Aligned Contact/Via Scheme Public/Granted day:2010-12-02
Information query
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