Invention Grant
US08212286B2 Semiconductor light receiving element 失效
半导体光接收元件

  • Patent Title: Semiconductor light receiving element
  • Patent Title (中): 半导体光接收元件
  • Application No.: US12810089
    Application Date: 2008-12-25
  • Publication No.: US08212286B2
    Publication Date: 2012-07-03
  • Inventor: Emiko Fujii
  • Applicant: Emiko Fujii
  • Applicant Address: JP Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JP Tokyo
  • Priority: JP2007-334669 20071226
  • International Application: PCT/JP2008/003949 WO 20081225
  • International Announcement: WO2009/081585 WO 20090702
  • Main IPC: H01L31/07
  • IPC: H01L31/07 H01L27/148 H01L23/58
Semiconductor light receiving element
Abstract:
The semiconductor light receiving element 1 includes a semiconductor substrate 101, and a semiconductor layer having a photo-absorption layer 105 disposed on the top of the semiconductor substrate 101. The semiconductor layer of the semiconductor light receiving element 1 containing at least the photo-absorption layer 105 has a mesa structure, and a side wall of the mesa is provided with a protective film 113 covering the side wall. The protective film 113 is a silicon nitride film containing hydrogen, and a hydrogen concentration in one surface of the protective film 113 located at the side of the mesa side wall is lower than a hydrogen concentration in the other surface of the protective film 113 located at the side that is opposite to the side of the mesa side wall.
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