Invention Grant
- Patent Title: Semiconductor storage device and methods of producing it
- Patent Title (中): 半导体存储装置及其制造方法
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Application No.: US12704239Application Date: 2010-02-11
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Publication No.: US08212298B2Publication Date: 2012-07-03
- Inventor: Fujio Masuoka , Shintaro Arai
- Applicant: Fujio Masuoka , Shintaro Arai
- Applicant Address: SG Peninsula Plaza
- Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Hofer Gilson & Lione
- Priority: WOPCT/JP2008/051304 20080129
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor storage device where one MOS transistor in a memory cell section includes a selection transistor, and one MOS transistor in a peripheral circuit section includes a first MOS transistor and a second MOS transistor of different conductivity type, the first MOS and second MOS transistors and the selection transistor include lower drain or source regions in a planar semiconductor layer, a pillar-shaped semiconductor layer on the planar semiconductor layer, upper source or drain regions in an upper portion of the pillar-shaped semiconductor layer, and a gate electrode that surrounds a sidewall of the pillar-shaped semiconductor layer through a dielectric film, and where a first silicide layer connects a surface of the lower drain or source region of the first MOS and second MOS transistors, and a second silicide layer on a surface of the lower drain or source region of the selection transistor.
Public/Granted literature
- US20100213525A1 SEMICONDUCTOR STORAGE DEVICE AND METHODS OF PRODUCING IT Public/Granted day:2010-08-26
Information query
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