Invention Grant
- Patent Title: Non-volatile memory device and method of manufacturing same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US12918465Application Date: 2009-02-19
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Publication No.: US08212309B2Publication Date: 2012-07-03
- Inventor: Yukihide Tsuji
- Applicant: Yukihide Tsuji
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2008-039032 20080220
- International Application: PCT/JP2009/052913 WO 20090219
- International Announcement: WO2009/104688 WO 20090827
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
Provided are an architecture for a non-volatile memory device that can increase the write efficiency for split-gate trap memory, as well as increase resistance to disturbances; and a method of manufacturing said memory device. The device includes, at least: a layered film having traps, formed on top of the semiconductor substrate; a memory gate electrode formed on top of the layered film; a word gate electrode laid out so as to contact the memory gate electrode and the substrate through an insulating film; and source and drain regions in the substrate, sandwiching the two gate electrodes. The equivalent oxide thickness of the insulating film sandwiched between the word gate electrode and the substrate is made greater where the layered film is in contact than where there is no contact.
Public/Granted literature
- US20110006357A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2011-01-13
Information query
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