Invention Grant
- Patent Title: Manufacturing method for a micromechanical component having a thin-layer capping
- Patent Title (中): 具有薄层封盖的微机械部件的制造方法
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Application No.: US12835328Application Date: 2010-07-13
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Publication No.: US08212326B2Publication Date: 2012-07-03
- Inventor: Ando Feyh
- Applicant: Ando Feyh
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009027898 20090721
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A manufacturing method for a micromechanical component having a thin-layer capping. The method includes the following: forming a functional layer on a substrate; structuring the functional layer in first cutout regions having a first width and in regions of the functional layer to be removed having a second width, the second width being substantially greater than the first width; forming a first oxide layer on the structured functional layer; forming a first sealing layer on the thermally oxidized and structured functional layer, the first cutout regions having the first width being sealed; forming a cap layer on the first sealing layer; forming first through holes which extend through the cap layer, the first sealing layer, and the first oxide layer for at least partially exposing the regions of the functional layer to be removed; and selectively removing the regions of the functional layer to be removed, by introducing a first etching medium through the first through holes, resulting in second cutout regions in the functional layer which have the second width.
Public/Granted literature
- US20110018078A1 Manufacturing method for a micromechanical component having a thin-layer capping Public/Granted day:2011-01-27
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