Invention Grant
US08212335B2 Semiconductor substrate having a flexible, heat resistant, graphite substrate 有权
半导体衬底具有柔性,耐热的石墨衬底

Semiconductor substrate having a flexible, heat resistant, graphite substrate
Abstract:
To provide a semiconductor substrate, a semiconductor device, a light emitting device and an electronic device which have a low price, a long lifetime, and a high luminescent efficiency, and moreover are capable of being bent. A graphite substrate having heat resistance and having flexibility with respect to external force, and a first semiconductor layer, provided on the graphite substrate, which is made of a nitride of the Group XIII are included, and a method such as pulse sputter deposition can be used in forming the first semiconductor layer on the graphite substrate, to thereby allow inexpensive manufacture to be possible. In addition, since the nitride of the Group XIII is an inorganic substance, it has a long lifetime, and thus a high luminescent efficiency can be obtained. Moreover, since the graphite substrate has flexibility with respect to external force, it can also be bent.
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