Invention Grant
- Patent Title: Semiconductor substrate having a flexible, heat resistant, graphite substrate
- Patent Title (中): 半导体衬底具有柔性,耐热的石墨衬底
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Application No.: US12735826Application Date: 2009-02-20
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Publication No.: US08212335B2Publication Date: 2012-07-03
- Inventor: Hiroshi Fujioka
- Applicant: Hiroshi Fujioka
- Applicant Address: JP Tokyo
- Assignee: The University of Tokyo
- Current Assignee: The University of Tokyo
- Current Assignee Address: JP Tokyo
- Agency: Kenyon & Kenyon LLP
- Priority: JP2008-039672 20080221
- International Application: PCT/JP2009/053078 WO 20090220
- International Announcement: WO2009/104759 WO 20090827
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L31/0256 ; H01L29/06 ; H01L31/0328 ; H01L31/0336 ; H01L31/072 ; H01L31/109 ; H01L27/15 ; H01L29/26 ; H01L31/12 ; H01L33/00 ; H01L29/24 ; H01L23/58

Abstract:
To provide a semiconductor substrate, a semiconductor device, a light emitting device and an electronic device which have a low price, a long lifetime, and a high luminescent efficiency, and moreover are capable of being bent. A graphite substrate having heat resistance and having flexibility with respect to external force, and a first semiconductor layer, provided on the graphite substrate, which is made of a nitride of the Group XIII are included, and a method such as pulse sputter deposition can be used in forming the first semiconductor layer on the graphite substrate, to thereby allow inexpensive manufacture to be possible. In addition, since the nitride of the Group XIII is an inorganic substance, it has a long lifetime, and thus a high luminescent efficiency can be obtained. Moreover, since the graphite substrate has flexibility with respect to external force, it can also be bent.
Public/Granted literature
- US20100320450A1 SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE, LIGHT EMITTING DEVICE AND ELECTRONIC DEVICE Public/Granted day:2010-12-23
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