Invention Grant
- Patent Title: Structure for encapsulating microelectronic devices
- Patent Title (中): 用于封装微电子器件的结构
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Application No.: US11542088Application Date: 2006-10-02
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Publication No.: US08212351B1Publication Date: 2012-07-03
- Inventor: Michael J Debar , David J Howard , Daniel M. So
- Applicant: Michael J Debar , David J Howard , Daniel M. So
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Farjami & Farjami LLP
- Main IPC: H01L23/12
- IPC: H01L23/12

Abstract:
According to an embodiment disclosed herein, a microelectronic device to be encapsulated is built on, or alternatively in, a substrate. The device is then coated with a sacrificial layer. A lid layer is deposited over the sacrificial layer, and then appropriately perforated to optimize the removal of the sacrificial layer. The sacrificial layer is then removed using one of several etching or other processes. The perforations in the lid layer are then sealed using a viscous sealing material, thereby fixing the environment that encapsulates the device. The sealing material is then cured or hardened. An optional moisture barrier may be deposited over the cured sealing layer to provide further protection for the encapsulation if needed.
Information query
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