Invention Grant
US08212428B2 Portable power supply apparatus for generating microwave-excited microplasmas
有权
用于产生微波激发微量等离子体的便携式电源装置
- Patent Title: Portable power supply apparatus for generating microwave-excited microplasmas
- Patent Title (中): 用于产生微波激发微量等离子体的便携式电源装置
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Application No.: US12472425Application Date: 2009-05-27
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Publication No.: US08212428B2Publication Date: 2012-07-03
- Inventor: Jun Choi , Jae Koo Lee , Jae Yoon Sim
- Applicant: Jun Choi , Jae Koo Lee , Jae Yoon Sim
- Applicant Address: KR Pohang-si, Gyeongsangbuk-do
- Assignee: Postech Academy Industry Foundation
- Current Assignee: Postech Academy Industry Foundation
- Current Assignee Address: KR Pohang-si, Gyeongsangbuk-do
- Agency: Kile Park Goekjian Reed & McManus PLLC
- Priority: KR10-2009-0013574 20090218
- Main IPC: H02J7/00
- IPC: H02J7/00

Abstract:
Provided is a portable power supply apparatus for generating microwave plasma, capable of minimizing a power reflected from a plasma generation apparatus and improving power consumption of the plasma generation apparatus by generating the plasma by using a microwave having a specific frequency, monitoring the power reflected from the plasma generation apparatus after the generation of the plasma, detecting a changed impedance matching condition, and correcting the frequency.
Public/Granted literature
- US20100207528A1 PORTABLE POWER SUPPLY APPARATUS FOR GENERATING MICROWAVE-EXCITED MICROPLASMAS Public/Granted day:2010-08-19
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