Invention Grant
US08212454B2 Piezoelectric vibrator, piezoelectric vibrator manufacturing method, oscillator, electronic device, radio-controlled timepiece
失效
压电振动器,压电振动器制造方法,振荡器,电子装置,无线电控制时计
- Patent Title: Piezoelectric vibrator, piezoelectric vibrator manufacturing method, oscillator, electronic device, radio-controlled timepiece
- Patent Title (中): 压电振动器,压电振动器制造方法,振荡器,电子装置,无线电控制时计
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Application No.: US12868433Application Date: 2010-08-25
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Publication No.: US08212454B2Publication Date: 2012-07-03
- Inventor: Osamu Onitsuka , Kazuyoshi Sugama
- Applicant: Osamu Onitsuka , Kazuyoshi Sugama
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2009-194475 20090825
- Main IPC: H01L41/053
- IPC: H01L41/053

Abstract:
Providing a piezoelectric vibrator and a manufacturing method thereof which is capable of achieving gettering in a state where the frequency change of the piezoelectric vibrating reed is suppressed. Providing a piezoelectric vibrator 1 including: a package 9 having a base board 2 and a lid board 3 which are bonded in a superimposed state and a cavity C formed between both boards 2, 3; and a piezoelectric vibrating reed 4 and a gettering material 27 which are accommodated in the same cavity C, wherein a shielding wall 21 is provided in the cavity C so as to shield the piezoelectric vibrating reed 4 from the gettering material 27, and the shielding wall 21 is connected to both the base board 2 and the lid board 3.
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