Invention Grant
- Patent Title: Piezoelectric/electrostrictive film element and method manufacturing the same
- Patent Title (中): 压电/电致伸缩膜元件及其制造方法
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Application No.: US12358559Application Date: 2009-01-23
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Publication No.: US08212455B2Publication Date: 2012-07-03
- Inventor: Yukinobu Yura , Shohei Yokoyama , Nobuyuki Kobayashi , Tsutomu Nanataki
- Applicant: Yukinobu Yura , Shohei Yokoyama , Nobuyuki Kobayashi , Tsutomu Nanataki
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2008-019717 20080130; JP2008-074427 20080321; JP2008-152099 20080610; JP2008-152100 20080610; JP2008-303236 20081127
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
An actuator includes a fired ceramic substrate having a space opened downward, a first electrode formed on the upper surface of the fired ceramic substrate above the space, a piezoelectric/electrostrictive body formed on the first electrode so that the volume changes with input and output of electric power, and a second electrode formed on the piezoelectric/electrostrictive body. The piezoelectric/electrostrictive body is composed of Pb(Zr1-xTix)O3 or (Li, Na, K) (Nb, Ta)O3 as a main component and contains crystals oriented along the direction of an electric field. In the actuator, the degree of orientation of the piezoelectric/electrostrictive body can be increased regardless of the orientation of the substrate on which the piezoelectric/electrostrictive body is formed.
Public/Granted literature
- US20090189489A1 PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT AND METHOD MANUFACTURING THE SAME Public/Granted day:2009-07-30
Information query
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