Invention Grant
US08212574B2 Film thickness sensor having a porous blower 有权
膜厚传感器具有多孔鼓风机

Film thickness sensor having a porous blower
Abstract:
A sensor system for measuring the thickness of flat material that is moved relative to the sensor system has a first sensor device for measuring the thickness of the flat material and a device for generating an air cushion. The device is disposed in such a way that there is an air cushion between at least one side of the sensor device that faces the flat material, and the flat material, during operation. In the region of the air cushion, the first sensor device includes surface sections having porous material and/or material that is provided with micro-holes.
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