Invention Grant
- Patent Title: Fixing apparatus for a probe card
- Patent Title (中): 探针卡固定装置
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Application No.: US12598216Application Date: 2008-05-22
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Publication No.: US08212579B2Publication Date: 2012-07-03
- Inventor: Yoshihiro Abe , Shigeru Matsumura
- Applicant: Yoshihiro Abe , Shigeru Matsumura
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein P.L.C.
- Priority: JP2007-145410 20070531
- International Application: PCT/JP2008/059457 WO 20080522
- International Announcement: WO2008/146705 WO 20081204
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R31/02 ; G01R31/00

Abstract:
A fixing apparatus for fixing a probe card to a holder includes a screw fixed to the holder and binding the probe card onto the holder in a vertical direction, a first bearing member intervening between a head of the screw and the probe card and allowing expansion and contraction of the probe card with respect to the screw in a horizontal direction, and a second bearing member intervening between the probe card and the holder and allowing expansion and contraction of the probe card with respect to the holder in the horizontal direction.
Public/Granted literature
- US20100127726A1 FIXING APPARATUS FOR A PROBE CARD Public/Granted day:2010-05-27
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