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US08212634B2 Vertical coplanar waveguide with tunable characteristic impedance design structure and method of fabricating the same 有权
具有可调谐特性阻抗设计结构的垂直共面波导及其制造方法

Vertical coplanar waveguide with tunable characteristic impedance design structure and method of fabricating the same
Abstract:
An on-chip vertical coplanar waveguide with tunable characteristic impedance, a design structure, and a method of making the same. An on-chip transmission line includes a signal line, an upper ground line spaced apart from and above the signal line, and a lower ground line spaced apart from and below the signal line. The signal line, the upper ground line and the lower ground line are substantially vertically aligned in a dielectric material.
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