Invention Grant
- Patent Title: Vertical coplanar waveguide with tunable characteristic impedance design structure and method of fabricating the same
- Patent Title (中): 具有可调谐特性阻抗设计结构的垂直共面波导及其制造方法
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Application No.: US12478385Application Date: 2009-06-04
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Publication No.: US08212634B2Publication Date: 2012-07-03
- Inventor: Essam Mina , Guoan Wang
- Applicant: Essam Mina , Guoan Wang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01P3/00
- IPC: H01P3/00 ; H01P3/18

Abstract:
An on-chip vertical coplanar waveguide with tunable characteristic impedance, a design structure, and a method of making the same. An on-chip transmission line includes a signal line, an upper ground line spaced apart from and above the signal line, and a lower ground line spaced apart from and below the signal line. The signal line, the upper ground line and the lower ground line are substantially vertically aligned in a dielectric material.
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