Invention Grant
- Patent Title: Electrostatic comb-drive micromechanical actuator
- Patent Title (中): 静电梳状驱动微机械执行器
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Application No.: US13130930Application Date: 2009-11-17
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Publication No.: US08213066B2Publication Date: 2012-07-03
- Inventor: Ulrich Hofmann , Marten Oldsen , Bernd Wagner
- Applicant: Ulrich Hofmann , Marten Oldsen , Bernd Wagner
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Venable LLP
- Agent Robert Kinberg
- Priority: DE102008059634 20081128
- International Application: PCT/EP2009/008160 WO 20091117
- International Announcement: WO2010/060552 WO 20100603
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
The invention relates to a micromechanical actuator, especially a micro-mirror scanner, comprising an actuator unit in an outer frame which unit is suspended in the outer frame via two torsion elements, and electrostatic tilt drives from intermeshing first and second comb-type electrodes which are off-set from each other vertically. The first electrodes are rigidly connected to the outer frame and the second electrodes to the outer frame via an outer connecting element and to the actuator unit via an inner connecting element. The inner connecting element has a spring which extends in parallel to the outer tilting axis, which is connected to the same in a section of the actuator unit close the outer tilting axis, and which is designed and arranged to be rigid in the vertical direction and flexible at a right angle to the vertical direction. The micromechanical actuator according to the invention allows the use in a micro-mirror scanner whose slow axis is non-resonantly driven with excursions of >+/−7°, lateral mirror sizes having dimensions of 1 mm and more and a resonant frequency of >1 kHz and can be integrated even into flat mobile phones.
Public/Granted literature
- US20120075685A1 ELECTROSTATIC COMB-DRIVE MICROMECHANICAL ACTUATOR Public/Granted day:2012-03-29
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