Invention Grant
US08213676B2 Inspection apparatus method and apparatus comprising motion responsive control 有权
包括运动响应控制的检查装置方法和装置

Inspection apparatus method and apparatus comprising motion responsive control
Abstract:
An inspection apparatus can process image data of one or more frames. In one aspect processing of image data can include processing for determination of a motion parameter. In one aspect an inspection apparatus can be controlled responsively to the processing of image data for determination of a motion parameter.
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