Invention Grant
US08214915B2 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
有权
悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
- Patent Title: Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
- Patent Title (中): 悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
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Application No.: US12455556Application Date: 2009-06-03
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Publication No.: US08214915B2Publication Date: 2012-07-03
- Inventor: Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
- Applicant: Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2008-152127 20080610
- Main IPC: G01Q20/00
- IPC: G01Q20/00
Abstract:
Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
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