Invention Grant
US08214916B2 Large area, homogeneous array fabrication including leveling with use of bright spots 失效
大面积,均匀的阵列制造,包括使用亮点的流平

Large area, homogeneous array fabrication including leveling with use of bright spots
Abstract:
Better leveling procedures for patterning at the small scale including the nanoscale. A method comprising: providing at least one array of cantilevers comprising tips thereon, wherein the cantilevers comprise at least one relatively bright spot, or at least two relatively bright spots, near the tip upon viewing, providing a substrate, leveling the array and the substrate with respect to each other, wherein the relatively bright spot near the tip is viewed to determine a contact of the tip and substrate.
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