Invention Grant
- Patent Title: Imprinting device and imprinting method
- Patent Title (中): 压印装置和压印方法
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Application No.: US12810557Application Date: 2008-12-25
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Publication No.: US08215944B2Publication Date: 2012-07-10
- Inventor: Yoshiaki Takaya , Yuji Hashima , Yoshihisa Hayashida , Hirosuke Kawaguchi , Satoru Tanaka , Akihiko Kanai , Kazuaki Uehara
- Applicant: Yoshiaki Takaya , Yuji Hashima , Yoshihisa Hayashida , Hirosuke Kawaguchi , Satoru Tanaka , Akihiko Kanai , Kazuaki Uehara
- Applicant Address: JP Kanagawa
- Assignee: Scivax Corporation
- Current Assignee: Scivax Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Maier & Maier, PLLC
- Priority: JP2007-335093 20071226
- International Application: PCT/JP2008/003953 WO 20081225
- International Announcement: WO2009/081586 WO 20090702
- Main IPC: A01J21/00
- IPC: A01J21/00 ; A01J25/12 ; B28B11/08 ; B29C35/04

Abstract:
The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.
Public/Granted literature
- US20110024948A1 IMPRINTING DEVICE AND IMPRINTING METHOD Public/Granted day:2011-02-03
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