Invention Grant
- Patent Title: Method for producing a semiconductor crystal
- Patent Title (中): 半导体晶体的制造方法
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Application No.: US12073178Application Date: 2008-02-29
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Publication No.: US08216365B2Publication Date: 2012-07-10
- Inventor: Seiji Nagai , Shiro Yamazaki , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- Applicant: Seiji Nagai , Shiro Yamazaki , Takayuki Sato , Katsuhiro Imai , Makoto Iwai , Takatomo Sasaki , Yusuke Mori , Fumio Kawamura
- Applicant Address: JP Nishikasugai-gun, Aichi-ken
- Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee Address: JP Nishikasugai-gun, Aichi-ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2007-053321 20070302
- Main IPC: C30B25/18
- IPC: C30B25/18

Abstract:
Objects of the invention are to further enhance crystallinity and crystallinity uniformity of a semiconductor crystal produced through the flux method, and to effectively enhance the production yield of the semiconductor crystal. The c-axis of a seed crystal including a GaN single-crystal layer is aligned in a horizontal direction (y-axis direction), one a-axis of the seed crystal is aligned in the vertical direction, and one m-axis is aligned in the x-axis direction. Thus, three contact points at which a supporting tool contacts the seed crystal are present on m-plane. The supporting tool has two supporting members, which extend in the vertical direction. One supporting member has an end part, which is inclined at 30° with respect to the horizontal plane α. The reasons for supporting a seed crystal at m-plane thereof are that m-plane exhibits a crystal growth rate, which is lower than that of a-plane, and that desired crystal growth on c-plane is not inhibited. Actually, a plurality of seed crystals and supporting tools are periodically placed along the y-axis direction.
Public/Granted literature
- US20080223286A1 Method for producing a semiconductor crystal Public/Granted day:2008-09-18
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