Invention Grant
- Patent Title: Substrate cleaning method and substrate cleaning apparatus
- Patent Title (中): 基板清洗方法和基板清洗装置
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Application No.: US12400419Application Date: 2009-03-09
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Publication No.: US08216389B2Publication Date: 2012-07-10
- Inventor: Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
- Applicant: Kousuke Yoshihara , Yuichi Yoshida , Taro Yamamoto
- Applicant Address: JP Tokyo-To
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo-To
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-096725 20080403
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B3/02

Abstract:
A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
Public/Granted literature
- US20090250079A1 SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS Public/Granted day:2009-10-08
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