Invention Grant
US08216390B2 Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus 有权
清洁和防干燥方法以及清洁和防干燥装置

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus
Abstract:
A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.
Information query
Patent Agency Ranking
0/0