Invention Grant
- Patent Title: Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus
- Patent Title (中): 清洁和防干燥方法以及清洁和防干燥装置
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Application No.: US12549573Application Date: 2009-08-28
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Publication No.: US08216390B2Publication Date: 2012-07-10
- Inventor: Yasuyuki Kometani , Takeshi Hirao , Kentaro Yamamura , Kenichi Miyamoto
- Applicant: Yasuyuki Kometani , Takeshi Hirao , Kentaro Yamamura , Kenichi Miyamoto
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown
- Priority: JP2008-226845 20080904
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B7/04 ; B08B3/00

Abstract:
A cleaning and drying-preventing method including: positioning a nozzle in a container such that a funnel-like inner circumferential surface of the container is located around a periphery of a distal end of the nozzle; sucking a liquid in the nozzle to retract a level of the liquid to a side of a supply passage; supplying a solvent into the container to form a swirl flow of the solvent turning around the distal end of the nozzle, and cleaning the nozzle by the swirl flow; supplying a solvent into the container to form a liquid pool of the solvent; and further retracting the level of the liquid in the nozzle to the side of the supply passage. A liquid layer, an air layer, and a solvent layer are formed in the nozzle in this order from the side of the supply passage, to prevent drying of the liquid in the nozzle.
Public/Granted literature
- US20100051059A1 CLEANING AND DRYING-PREVENTING METHOD, AND CLEANING AND DRYING-PREVENTING APPARATUS Public/Granted day:2010-03-04
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