Invention Grant
- Patent Title: Substrate support bushing
- Patent Title (中): 基板支撑衬套
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Application No.: US11044245Application Date: 2005-01-27
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Publication No.: US08216422B2Publication Date: 2012-07-10
- Inventor: Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
- Applicant: Shinichi Kurita , Suhail Anwar , Toshio Kiyotake
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/458 ; H01L21/3065 ; G01V8/00

Abstract:
An apparatus for supporting a substrate within a processing chamber is provided. In one aspect, a substrate support member is provided comprising a housing having a bore formed therethrough, a support pin at least partially disposed within the bore, and a plurality of bearing elements disposed about the housing. In one aspect, the bearing elements comprise a roller having a central bore formed therethrough, a contoured outer surface, and a shaft at least partially disposed through the central bore. In another aspect, the bearing elements comprise a ball assembly comprising a larger spherical member and four smaller spherical members arranged about the larger spherical member.
Public/Granted literature
- US20050220604A1 Substrate support bushing Public/Granted day:2005-10-06
Information query
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