Invention Grant
- Patent Title: Production methods of electronic devices
- Patent Title (中): 电子设备的生产方法
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Application No.: US12289331Application Date: 2008-10-24
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Publication No.: US08216884B2Publication Date: 2012-07-10
- Inventor: Mitsutoshi Higashi
- Applicant: Mitsutoshi Higashi
- Applicant Address: JP Nagano
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano
- Agency: Staas & Halsey LLP
- Priority: JP2002-381073 20021227
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of producing an electronic device having mounted thereon a microelectromechanical system element. The method includes forming a micromachine component and electronic component for operation of the micromachine component on a substrate to form the system element, and bonding to the substrate a lid covering an active surface of the substrate and provided with wiring patterns to define an operating space for the micromachine component and electrically connecting the electronic component and the wiring patterns of the lid at a bonded part of the substrate and the lid.
Public/Granted literature
- US20090068795A1 Production methods of electronic devices Public/Granted day:2009-03-12
Information query
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