Invention Grant
- Patent Title: Stress enhanced transistor devices and methods of making
- Patent Title (中): 应力增强晶体管器件和制造方法
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Application No.: US12691170Application Date: 2010-01-21
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Publication No.: US08216893B2Publication Date: 2012-07-10
- Inventor: Johnathan E. Faltermeier , Judson R. Holt , Xuefeng Hua
- Applicant: Johnathan E. Faltermeier , Judson R. Holt , Xuefeng Hua
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Joseph Petrokaitis
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Stress enhanced transistor devices and methods of fabricating the same are disclosed. In one embodiment, a transistor device comprises: a gate conductor spaced above a semiconductor substrate by a gate dielectric, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the channel region comprises undercut areas under the gate conductor; a stressed material embedded in the undercut areas of the channel region under the gate conductor; and epitaxially grown source and drain regions disposed in the recessed regions of the semiconductor substrate laterally adjacent to the stressed material.
Public/Granted literature
- US20100187578A1 STRESS ENHANCED TRANSISTOR DEVICES AND METHODS OF MAKING Public/Granted day:2010-07-29
Information query
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