Invention Grant
- Patent Title: Scanner device for scanning probe microscope
- Patent Title (中): 用于扫描探针显微镜的扫描仪
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Application No.: US12995875Application Date: 2009-05-29
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Publication No.: US08217367B2Publication Date: 2012-07-10
- Inventor: Takeshi Fukuma , Toshio Ando , Yasutaka Okazaki
- Applicant: Takeshi Fukuma , Toshio Ando , Yasutaka Okazaki
- Applicant Address: JP Ishikawa
- Assignee: National University Corporation Kanazawa University
- Current Assignee: National University Corporation Kanazawa University
- Current Assignee Address: JP Ishikawa
- Agency: Pearne & Gordon LLP
- Priority: JP2008-147041 20080604
- International Application: PCT/JP2009/002381 WO 20090529
- International Announcement: WO2009/147807 WO 20091210
- Main IPC: G01Q10/00
- IPC: G01Q10/00

Abstract:
A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device (1) used for a scanning probe microscope includes a Z actuator (7) which scans an object to be scanned in a scanning direction, and a Z actuator holder (11) which holds the Z actuator (7). The Z actuator holder (11) holds the Z actuator (7) at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator (7) has a rectangular cross-section, and the four edges of the Z actuator (7) are held by the Z actuator holder (11). The Z actuator (7) is pressed into a holding hole (29) of the Z actuator holder (11).
Public/Granted literature
- US20110093989A1 SCANNER DEVICE FOR SCANNING PROBE MICROSCOPE Public/Granted day:2011-04-21
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