Invention Grant
- Patent Title: Vibration-actuated micro mirror device
- Patent Title (中): 振动微镜装置
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Application No.: US12963024Application Date: 2010-12-08
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Publication No.: US08218214B2Publication Date: 2012-07-10
- Inventor: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- Applicant: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: WPAT., P.C.
- Agent Justin King
- Priority: TW99127428A 20100817
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.
Public/Granted literature
- US20120044555A1 VIBRATION-ACTUATED MICRO MIRROR DEVICE Public/Granted day:2012-02-23
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