Invention Grant
US08218285B2 Variable capacitance element 有权
可变电容元件

Variable capacitance element
Abstract:
A variable capacitance element provided with a substrate, a signal line provided on the substrate, a fixed electrode provided on the substrate, and a movable electrode. The movable electrode includes a movable portion that spans the signal line and extends to above the fixed electrode, and is movable with respect to the fixed electrode, and a fixed portion that is fixed to the fixed electrode across a dielectric layer.
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