Invention Grant
US08218358B2 Nonvolatile semiconductor memory device and method for driving same
有权
非易失性半导体存储器件及其驱动方法
- Patent Title: Nonvolatile semiconductor memory device and method for driving same
- Patent Title (中): 非易失性半导体存储器件及其驱动方法
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Application No.: US12851054Application Date: 2010-08-05
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Publication No.: US08218358B2Publication Date: 2012-07-10
- Inventor: Ryota Katsumata , Hideaki Aochi , Hiroyasu Tanaka , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Yosuke Komori , Megumi Ishiduki , Junya Matsunami , Tomoko Fujiwara , Ryouhei Kirisawa , Yoshimasa Mikajiri , Shigeto Oota
- Applicant: Ryota Katsumata , Hideaki Aochi , Hiroyasu Tanaka , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Yosuke Komori , Megumi Ishiduki , Junya Matsunami , Tomoko Fujiwara , Ryouhei Kirisawa , Yoshimasa Mikajiri , Shigeto Oota
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-251891 20091102
- Main IPC: G11C11/14
- IPC: G11C11/14

Abstract:
According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and a drive circuit. The stacked body is provided on the substrate. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. A through-hole is made in the stacked body to align in a stacking direction. The semiconductor pillar is buried in an interior of the through-hole. The charge storage film is provided between the electrode film and the semiconductor pillar. The drive circuit supplies a potential to the electrode film. The diameter of the through-hole differs by a position in the stacking direction. The drive circuit supplies a potential to reduce a potential difference with the semiconductor pillar as a diameter of the through-hole piercing the electrode film decreases.
Public/Granted literature
- US20110103153A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR DRIVING SAME Public/Granted day:2011-05-05
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