Invention Grant
US08218796B2 Microphone unit and method of manufacturing the same 有权
麦克风单元及其制造方法

Microphone unit and method of manufacturing the same
Abstract:
A microphone unit includes a substrate. The substrate includes a first face formed with a first recess, a second face opposite to the first face, and a through hole communicating the second face to a bottom part of the first recess. A diaphragm unit includes a diaphragm, and at least a part of which is disposed in the first recess so that the diaphragm opposes the through hole.
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