Invention Grant
US08220068B2 Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth
有权
通过纳米线生长形成的单片高宽比纳米尺寸扫描探针显微镜（SPM）尖端
- Patent Title: Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth
- Patent Title (中): 通过纳米线生长形成的单片高宽比纳米尺寸扫描探针显微镜（SPM）尖端
-
Application No.: US12533427Application Date: 2009-07-31
-
Publication No.: US08220068B2Publication Date: 2012-07-10
- Inventor: Guy M. Cohen , Hendrik F. Hamann
- Applicant: Guy M. Cohen , Hendrik F. Hamann
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: G01Q70/12
- IPC: G01Q70/12
Abstract:
A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
Public/Granted literature
- US20090293162A1 MONOLITHIC HIGH ASPECT RATIO NANO-SIZE SCANNING PROBE MICROSCOPE (SPM) TIP FORMED BY NANOWIRE GROWTH Public/Granted day:2009-11-26
Information query
