Invention Grant
US08220337B2 Micromechanical sensor element for capacitive pressure detection 有权
用于电容式压力检测的微机械传感器元件

  • Patent Title: Micromechanical sensor element for capacitive pressure detection
  • Patent Title (中): 用于电容式压力检测的微机械传感器元件
  • Application No.: US12931501
    Application Date: 2011-02-01
  • Publication No.: US08220337B2
    Publication Date: 2012-07-17
  • Inventor: Remigius Has
  • Applicant: Remigius Has
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102010001537 20100203
  • Main IPC: G01L9/12
  • IPC: G01L9/12
Micromechanical sensor element for capacitive pressure detection
Abstract:
A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter electrode in a second layer plane parallel to the first layer plane. The carrier structure is suspended in a closed cavity of the layered structure between two diaphragms, which are oriented essentially perpendicularly to the layer planes and delimit the cavity on two opposite sides. At least one pressure connection aperture is provided, via which at least one of the two diaphragms may be subjected to a pressure being measured. The carrier element is connected to the two diaphragms in such a way that diaphragm deformations cause a parallel shift of the measuring electrode relative to the counter electrode.
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