Invention Grant
- Patent Title: Turbo-molecular pump
- Patent Title (中): 涡轮分子泵
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Application No.: US12117392Application Date: 2008-05-08
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Publication No.: US08221052B2Publication Date: 2012-07-17
- Inventor: Shingo Tsutsui
- Applicant: Shingo Tsutsui
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Sughrue Mion, PLLC
- Priority: JP2007-129197 20070515
- Main IPC: F04D19/04
- IPC: F04D19/04

Abstract:
Disclosed is a turbo-molecular pump, which comprises a rotor including a first cylindrical body formed with a part of a plurality of rotating blades arranged in multistage, a second cylindrical body integrally connected to an outer peripheral region of a downstream end of the first cylindrical body and formed with the remaining rotating blades, and a stress-releasing protrusion extending from the downstream end of the first cylindrical body along a direction of a rotation axis of the rotor. The turbo-molecular pump of the present invention can reduce a stress in the downstream end of the first cylindrical body.
Public/Granted literature
- US20080286089A1 TURBO-MOLECULAR PUMP Public/Granted day:2008-11-20
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