Invention Grant
US08221190B2 Polishing apparatus cofigured to simultaneously polish two surfaces of a work
有权
抛光装置被配置成同时抛光工件的两个表面
- Patent Title: Polishing apparatus cofigured to simultaneously polish two surfaces of a work
- Patent Title (中): 抛光装置被配置成同时抛光工件的两个表面
-
Application No.: US12155263Application Date: 2008-05-30
-
Publication No.: US08221190B2Publication Date: 2012-07-17
- Inventor: Fumihiko Tokura , Mitsuo Takeuchi
- Applicant: Fumihiko Tokura , Mitsuo Takeuchi
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2007-208396 20070809
- Main IPC: B24B49/00
- IPC: B24B49/00 ; B24B51/00

Abstract:
A polishing apparatus to simultaneously polish both surfaces of a work, and includes a pair of stools rotating in opposite directions, a pair of detecting units to detect rotation rates of the stools, a pressurizing unit to compress the work between the pair of the stools, a slurry supply unit to supply a slurry to the stools, and a control unit to reduce, when determining that a frictional force between the polishing surface and the work exceeds a threshold, at least one of a load applied by the pressurizing unit, the rotation rate of the stools, and a supply amount of the slurry.
Public/Granted literature
Information query