Invention Grant
- Patent Title: Line scan sequential lateral solidification of thin films
- Patent Title (中): 线扫描顺序横向固化薄膜
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Application No.: US11293655Application Date: 2005-12-02
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Publication No.: US08221544B2Publication Date: 2012-07-17
- Inventor: James S. Im , Paul C. Van Der Wilt
- Applicant: James S. Im , Paul C. Van Der Wilt
- Applicant Address: US NY New York
- Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee Address: US NY New York
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- Main IPC: C30B13/00
- IPC: C30B13/00

Abstract:
A polycrystalline film is prepared by (a) providing a substrate having a thin film disposed thereon, said film capable of laser-induced melting, (b) generating a sequence of laser pulses having a fluence that is sufficient to melt the film throughout its thickness in an irradiated region, each pulse forming a line beam having a predetermined length and width, said width sufficient to prevent nucleation of solids in a portion of the thin film that is irradiated by the laser pulse, (c) irradiating a first region of the film with a first laser pulse to form a first molten zone, said first molten zone demonstrating a variation in width along its length to thereby define a maximum width (Wmax) and a minimum width (Wmin), wherein the first molten zone crystallizes upon cooling to form one or more laterally grown crystals, (d) laterally moving the film in the direction of lateral growth a distance that is greater than about one-half Wmax and less than Wmin; and (e) irradiating a second region of the film with a second laser pulse to form a second molten zone having a shape that is substantially the same as the shape of the first molten zone, wherein the second molten zone crystallizes upon cooling to form one or more laterally grown crystals that are elongations of the one or more crystals in the first region.
Public/Granted literature
- US20060254500A1 Line scan sequential lateral solidification of thin films Public/Granted day:2006-11-16
Information query
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