Invention Grant
- Patent Title: Procedure for in-situ determination of thermal gradients at the crystal growth front
- Patent Title (中): 在晶体生长前沿原位测定热梯度的程序
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Application No.: US12221229Application Date: 2008-07-31
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Publication No.: US08221545B2Publication Date: 2012-07-17
- Inventor: Benno Orschel , Andrzej Buczkowski , Joel Kearns , Keiichi Takanashi , Volker Todt
- Applicant: Benno Orschel , Andrzej Buczkowski , Joel Kearns , Keiichi Takanashi , Volker Todt
- Applicant Address: US AZ Phoenix JP Tokyo
- Assignee: Sumco Phoenix Corporation,Sumco Corporation
- Current Assignee: Sumco Phoenix Corporation,Sumco Corporation
- Current Assignee Address: US AZ Phoenix JP Tokyo
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: C30B15/20
- IPC: C30B15/20

Abstract:
A method and apparatus for growing a semiconductor crystal include pulling the semiconductor crystal from melt at a pull speed and modulating the pull speed by combining a periodic pull speed with an average speed. The modulation of the pull speed allows in-situ determination of characteristic temperature gradients in the melt and in the crystal during crystal formation. The temperature gradients may be used to control relevant process parameters that affect morphological stability or intrinsic material properties in the finished crystal such as for instance the target pull speed of the crystal or the melt gap, which determines the thermal gradient in the crystal during growth.
Public/Granted literature
- US20100024718A1 Procedure for in-situ determination of thermal gradients at the crystal growth front Public/Granted day:2010-02-04
Information query
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