Invention Grant
- Patent Title: Method and apparatus for manufacturing magnetic recording media
- Patent Title (中): 制造磁记录介质的方法和装置
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Application No.: US12829450Application Date: 2010-07-02
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Publication No.: US08221637B2Publication Date: 2012-07-17
- Inventor: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- Applicant: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- Current Assignee: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: JP2005-188388 20050628
- Main IPC: C23C14/46
- IPC: C23C14/46

Abstract:
According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
Public/Granted literature
- US20100264019A1 METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIA Public/Granted day:2010-10-21
Information query
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