Invention Grant
US08221881B2 Silicon particle, silicon particle superlattice and method for producing the same 有权
硅颗粒,硅颗粒超晶格及其制造方法

Silicon particle, silicon particle superlattice and method for producing the same
Abstract:
A production method, comprising a step of synthesizing silicon particle-containing silicon oxide particles by performing a gas phase reaction of monosilane gas and oxidizing gas for oxidizing the monosilane gas and a step of removing the silicon oxide with hydrofluoric acid after holding the silicon oxide particle powder in an inert atmosphere at 800-1400° C., provides high-purity silicon nanoparticles which are highly practical as material powder for high-performance light-emitting elements and electronic parts in an industrial scale.
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