Invention Grant
- Patent Title: Antireflective coating compositions
- Patent Title (中): 防反射涂料组合物
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Application No.: US12133562Application Date: 2008-07-08
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Publication No.: US08221965B2Publication Date: 2012-07-17
- Inventor: Huirong Yao , Zhong Xiang , Jianhui Shan , Salem Mullen , Hengpeng Wu
- Applicant: Huirong Yao , Zhong Xiang , Jianhui Shan , Salem Mullen , Hengpeng Wu
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp.
- Current Assignee: AZ Electronic Materials USA Corp.
- Current Assignee Address: US NJ Somerville
- Agent Alan P. Kass; Sangya Jain
- Main IPC: G03F1/58
- IPC: G03F1/58 ; G03F7/20 ; C08G69/00
Abstract:
Antireflective coating compositions and related polymers are disclosed.
Public/Granted literature
- US20100009293A1 Antireflective Coating Compositions Public/Granted day:2010-01-14
Information query
