Invention Grant
- Patent Title: Method of manufacturing multibit electro-mechanical memory device having movable electrode
- Patent Title (中): 具有可动电极的多位机电存储器件的制造方法
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Application No.: US13116374Application Date: 2011-05-26
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Publication No.: US08222067B2Publication Date: 2012-07-17
- Inventor: Eun-Jung Yun , Min-Sang Kim , Sung-Min Kim , Sung-Young Lee , Ji-Myoung Lee , In-Hyuk Choi
- Applicant: Eun-Jung Yun , Min-Sang Kim , Sung-Min Kim , Sung-Young Lee , Ji-Myoung Lee , In-Hyuk Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2007-0050223 20070523
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L29/84

Abstract:
A multibit electro-mechanical memory device comprises a substrate, a bit line on the substrate, a first interlayer insulating film on the bit line, first and second lower word lines on the first interlayer insulating film, the first and second lower word lines separated horizontally from each other by a trench, a spacer abutting a sidewall of each of the first and second lower word lines, a pad electrode inside a contact hole, first and second cantilever electrodes suspended over first and second lower voids that correspond to upper parts of the first and second lower word lines provided in both sides on the pad electrode, the first and second cantilever electrodes being separated from each other by the trench, and being curved in a third direction that is perpendicular to the first and second direction; a second interlayer insulating film on the pad electrode, first and second trap sites supported by the second interlayer insulating film to have first and second upper voids on the first and second cantilever electrodes, and first and second upper word lines on the first and second trap sites.
Public/Granted literature
- US20110230001A1 MULTIBIT ELECTRO-MECHANICAL MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-09-22
Information query
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