Invention Grant
- Patent Title: Fabricating TFT having fluorocarbon-containing layer
- Patent Title (中): 制造具有含氟烃层的TFT
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Application No.: US11837016Application Date: 2007-08-10
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Publication No.: US08222073B2Publication Date: 2012-07-17
- Inventor: Yiliang Wu , Ping Liu , Beng S Ong
- Applicant: Yiliang Wu , Ping Liu , Beng S Ong
- Applicant Address: US CT Norwalk
- Assignee: Xerox Corporation
- Current Assignee: Xerox Corporation
- Current Assignee Address: US CT Norwalk
- Agency: Fay Sharpe LLP
- Main IPC: G02F1/13
- IPC: G02F1/13 ; H01L29/94

Abstract:
A process for fabricating a thin film transistor comprising: (a) forming a gate dielectric; (b) forming a layer including a substance comprising a fluorocarbon structure; and (c) forming a semiconductor layer including a thiophene compound comprising one or more substituted thiophene units, one or more unsubstituted thiophene units, and optionally one or more divalent linkages, wherein the layer contacts the gate dielectric and is disposed between the semiconductor layer and the gate dielectric.
Public/Granted literature
- US20070275501A1 FABRICATING TFT HAVING FLUOROCARBON-CONTAINING LAYER Public/Granted day:2007-11-29
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