Invention Grant
- Patent Title: Semiconductor device having first and second source and drain electrodes sandwiched between an island-shaped semiconductor film
- Patent Title (中): 具有夹在岛状半导体膜之间的第一和第二源极和漏极的半导体器件
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Application No.: US12824899Application Date: 2010-06-28
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Publication No.: US08222098B2Publication Date: 2012-07-17
- Inventor: Tatsuya Honda
- Applicant: Tatsuya Honda
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLC
- Priority: JP2005-300825 20051014
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
An object is to obtain a semiconductor device with improved characteristics by reducing contact resistance of a semiconductor film with electrodes or wirings, and improving coverage of the semiconductor film and the electrodes or wirings. The present invention relates to a semiconductor device including a gate electrode over a substrate, a gate insulating film over the gate electrode, a first source or drain electrode over the gate insulating film, an island-shaped semiconductor film over the first source or drain electrode, and a second source or drain electrode over the island-shaped semiconductor film and the first source or drain electrode. Further, the second source or drain electrode is in contact with the first source or drain electrode, and the island-shaped semiconductor film is sandwiched between the first source or drain electrode and the second source or drain electrode. Moreover, the present invention relates to a manufacturing method of the semiconductor device.
Public/Granted literature
- US20100264420A1 Semiconductor Device and Manufacturing Method Thereof Public/Granted day:2010-10-21
Information query
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