Invention Grant
- Patent Title: Methods of forming an image sensor
- Patent Title (中): 形成图像传感器的方法
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Application No.: US12654636Application Date: 2009-12-28
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Publication No.: US08222131B2Publication Date: 2012-07-17
- Inventor: Gi Bum Kim , Yun Ki Lee
- Applicant: Gi Bum Kim , Yun Ki Lee
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0134567 20081226
- Main IPC: H01L21/22
- IPC: H01L21/22

Abstract:
Provided is a method of forming an image sensor. The method may include providing a single crystalline semiconductor layer including at least one photodiode onto a support substrate; forming a material layer including dopants on the single crystalline semiconductor layer; and forming a dopant diffusion layer in the single crystalline semiconductor layer by diffusing the dopants of the material layer.
Public/Granted literature
- US20100167453A1 Methods of forming an image sensor Public/Granted day:2010-07-01
Information query
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