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US08222562B2 Systems for forming a plurality of cells on the mastering tools 有权
用于在母盘制作工具上形成多个单元的系统

Systems for forming a plurality of cells on the mastering tools
Abstract:
Mastering tools and systems and methods for forming a plurality of cells on the mastering tools are provided. In particular, the systems vary the geometry of the cells or the placement of the cells, or both, for forming a textured surface on a mastering tool.
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