Invention Grant
US08222594B2 Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
有权
通过光学元件的周期性振荡改变路径长度来光学地检测可移动体的位置信息的编码器
- Patent Title: Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
- Patent Title (中): 通过光学元件的周期性振荡改变路径长度来光学地检测可移动体的位置信息的编码器
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Application No.: US12731725Application Date: 2010-03-25
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Publication No.: US08222594B2Publication Date: 2012-07-17
- Inventor: Susumu Makinouchi , Toru Imai , Akihiro Watanabe
- Applicant: Susumu Makinouchi , Toru Imai , Akihiro Watanabe
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-261541 20071005
- Main IPC: G01D5/34
- IPC: G01D5/34
Abstract:
A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.
Public/Granted literature
- US20100176282A1 ENCODER Public/Granted day:2010-07-15
Information query
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