Invention Grant
- Patent Title: Phase change memory device having a bottleneck constriction and method of manufacturing the same
- Patent Title (中): 具有瓶颈收缩的相变存储器件及其制造方法
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Application No.: US12539767Application Date: 2009-08-12
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Publication No.: US08222628B2Publication Date: 2012-07-17
- Inventor: Nam Kyun Park
- Applicant: Nam Kyun Park
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Ladas & Parry LLP
- Priority: KR10-2008-0091538 20080918
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A phase change memory device having a bottleneck constriction and method of making same are presented. The phase change memory device includes a semiconductor substrate, a lower electrode, an interlayer film, an insulator, a phase change layer and an upper electrode. The interlayer film is formed on the semiconductor substrate having the lower electrode. The interlayer film includes a laminate of a first insulating film, a silicon film and a second insulating film with a hole formed therethrough. The insulator is disposed along the exposed surface of the silicon film around the inner circumference of the hole. The phase change layer is embedded within the hole having the insulator which constricts the shape of the phase change layer to a bottleneck constriction. A method of manufacturing the phase change memory device is also provided.
Public/Granted literature
- US20100065805A1 PHASE CHANGE MEMORY DEVICE HAVING A BOTTLENECK CONSTRICTION AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-03-18
Information query
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