Invention Grant
US08222658B2 Semiconductor light emitting element and method of manufacturing therefor 有权
半导体发光元件及其制造方法

Semiconductor light emitting element and method of manufacturing therefor
Abstract:
A semiconductor light emitting element of the present invention comprises: a zinc oxide (ZnO) single crystal substrate 12 with a substrate surface of a plane orientation insusceptible to a piezo electric field; a Lattice-matched layer 13 formed on the substrate surface to be lattice-matched with the ZnO single crystal substrate 12; an active layer 15 of indium gallium nitride (InxGa1-xN, 0
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