Invention Grant
- Patent Title: Semiconductor component with integrated hall effect sensor
- Patent Title (中): 具有集成霍尔效应传感器的半导体元件
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Application No.: US12593493Application Date: 2008-03-26
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Publication No.: US08222679B2Publication Date: 2012-07-17
- Inventor: Thomas Uhlig , Felix Fuernhammer , Christoph Ellmers
- Applicant: Thomas Uhlig , Felix Fuernhammer , Christoph Ellmers
- Applicant Address: DE Erfurt
- Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee Address: DE Erfurt
- Agency: Hunton & Williams LLP
- Priority: DE102007016091 20070326; DE102007034803 20070723
- International Application: PCT/EP2008/053572 WO 20080326
- International Announcement: WO2008/116883 WO 20081002
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A semiconductor device with an integrated circuit on a semiconductor substrate comprises a Hall effect sensor in a first active region and a lateral high voltage MOS transistor in a second active region. The semiconductor device of the present invention is characterized in that the structure of the integrated Hall effect sensor is strongly related with the structure of a high-voltage DMOS transistor. The integrated Hall effect sensor is in some features similar to a per se known high-voltage DMOS transistor having a double RESURF structure. The control contacts of the Hall effect sensor correspond to the source and drain contacts of the high-voltage DMOS transistor. The semiconductor device of the present invention allows a simplification of the process integration.
Public/Granted literature
- US20110127583A1 SEMICONDUCTOR COMPONENT WITH INTEGRATED HALL EFFECT SENSOR Public/Granted day:2011-06-02
Information query
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