Invention Grant
- Patent Title: Flash memory device and method for manufacturing the same
- Patent Title (中): 闪存装置及其制造方法
-
Application No.: US12640691Application Date: 2009-12-17
-
Publication No.: US08222685B2Publication Date: 2012-07-17
- Inventor: Sung Kun Park
- Applicant: Sung Kun Park
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2008-0138872 20081231
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Disclosed are a dual bit type NROM flash memory device and a method for manufacturing the same using a self-aligned scheme. The flash memory device includes a plurality of bit lines buried in a substrate in one direction while being spaced apart from each other at a regular interval; floating gates aligned at both sides of each of the bit lines on the substrate; and a plurality of word lines spaced apart from each other at a regular interval while crossing the bit lines. In the flash memory device of an embodiment, polysilicon is used for a trapping layer, so the programming and erasing operations can be performed at a higher speed, a threshold voltage (Vt) window is widened, and retention characteristics are improved.
Public/Granted literature
- US20100163954A1 FLASH MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-07-01
Information query
IPC分类: